Piezoelectric Microsystem Technologies (PMT)

Activities

Activities per year 2018 2022 2023 2023

• 6 Editorial work
• 6 Oral presentation
• 4 Invited talk
• 3 Participating in a conference, workshop, ...
• 3 More
  • 2 TPC Member
  • 1 Poster Presentation

Activities per year

Search results

• Impact of CH4/H2 Gas Admixture on Pb(Zr1-xTix)O3 ICP-RIE Etching Performance

  Madeleine Petschnigg (Speaker), Sarah Risquez (Speaker), Syed Munir Azeem (Speaker), Annalisa De Pastina (Speaker), Anton Lagosh (Speaker) & Nikolai Andrianov (Speaker)

  19 Jun 2023 → 20 Jun 2023

  Activity: Talk or presentation › Poster Presentation