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Highly textured AlN and Al0.7Sc0.3N piezoelectric thin films with Hf(0002) seed layer
Sarah Risquez (Speaker)
Piezoelectric Microsystem Technologies (PMT)
Activity
:
Talk or presentation
›
Oral presentation
Period
16 Aug 2022
Event title
9th International PiezoMEMS Workshop 2022
Event type
Workshop
Location
Philadelphia, United States
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Documents & Links
https://piezomems2022.com
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