ADVANCED MICROFABRICATION OF PIEZOMEMS SENSORS AND ACTUATORS

Activity: Talk or presentation › Invited talk

Description

MEMS microfabrication technology and functionalization overview and strategies associated to 3 main applications: (i) suspended microcantilevers for single cell detection, (ii) microcantilver arrays in liquid for biomolecular recognition, (iii) piezoelectric thin film integration and technological challenges for next generation piezoMEMS devices.
PeriodJun 2023
Event titleTransducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems)
Event typeConference
LocationKyoto, JapanShow on map
Degree of RecognitionInternational

Keywords

  • MEMS, biosensors, piezoelectric thin film, microtechnology, cantilevers, resonators, microfabrication

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