Aktivität: Präsentation oder Vortrag › Geladener Gastvortrag
Beschreibung
MEMS microfabrication technology and functionalization overview and strategies associated to 3 main applications: (i) suspended microcantilevers for single cell detection, (ii) microcantilver arrays in liquid for biomolecular recognition, (iii) piezoelectric thin film integration and technological challenges for next generation piezoMEMS devices.
Zeitraum
Juni 2023
Ereignistitel
Transducers 2023 (The 22nd International Conference on Solid-State Sensors, Actuators and Microsystems)