Strong correlation of the piezoelectric response and microstructure in AlYN solid solutions

Physik & Astronomy

• solid solutions 100%
• microstructure 71%
• sputtering 47%
• wurtzite 45%
• yttrium 32%
• nitrides 28%
• thin films 23%
• halites 19%
• laser interferometry 19%
• epitaxy 15%
• microelectromechanical systems 14%
• homogeneity 14%
• gas mixtures 14%
• interlayers 13%
• performance 13%
• buffers 12%
• platforms 12%
• substitutes 12%
• physical properties 11%
• atomic force microscopy 11%
• costs 11%
• wafers 11%
• ceramics 10%
• scanning electron microscopy 9%
• physics 9%
• oxides 9%
• characterization 8%
• coefficients 8%
• predictions 8%
• spectroscopy 7%
• temperature 4%