Research of mechanical stresses in micromechanical structures based on silicon carbide films produced by magnetron sputtering

O.N. Mikhailova, A.V. Korlyakov, A.V. Lagosh

Publikation: Konferenzband/Beitrag in Buch/Bericht › Konferenzartikel › Begutachtung

Originalsprache	undefiniert/unbekannt
Titel	Journal of Physics: Conference Series
DOIs	https://doi.org/10.1088/1742-6596/872/1/012043
Publikationsstatus	Veröffentlicht - 2017

Zugriff auf Dokument

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title = "Research of mechanical stresses in micromechanical structures based on silicon carbide films produced by magnetron sputtering",

author = "O.N. Mikhailova and A.V. Korlyakov and A.V. Lagosh",

year = "2017",

doi = "10.1088/1742-6596/872/1/012043",

language = "undefiniert/unbekannt",

booktitle = "Journal of Physics: Conference Series",

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AU - Mikhailova, O.N.

AU - Korlyakov, A.V.

AU - Lagosh, A.V.

PY - 2017

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U2 - 10.1088/1742-6596/872/1/012043

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M3 - Konferenzartikel

BT - Journal of Physics: Conference Series

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