Raman Spectroscopy and Spectral Signatures of AlScN/Al2O3

Dmytro Solonenko, Agne Zukauskaite, Julian Pilz, Mohssen Moridi, Sarah Risquez

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Zugriff auf Dokument

@article{dcf4a1fd25084aa1806f651cf29da8be,

title = "Raman Spectroscopy and Spectral Signatures of AlScN/Al2O3",

keywords = "aluminium scandium nitride, piezoelectric films, Raman spectroscopy, alloy scattering, temperature coefficient",

author = "Dmytro Solonenko and Agne Zukauskaite and Julian Pilz and Mohssen Moridi and Sarah Risquez",

year = "2022",

month = nov,

day = "11",

doi = "https://doi.org/10.3390/mi13111961",

language = "English",

volume = "13",

number = "11",

}

TY - JOUR

T1 - Raman Spectroscopy and Spectral Signatures of AlScN/Al2O3

AU - Solonenko, Dmytro

AU - Zukauskaite, Agne

AU - Pilz, Julian

AU - Moridi, Mohssen

AU - Risquez, Sarah

PY - 2022/11/11

Y1 - 2022/11/11

KW - aluminium scandium nitride

KW - piezoelectric films

KW - Raman spectroscopy

KW - alloy scattering

KW - temperature coefficient

U2 - https://doi.org/10.3390/mi13111961

DO - https://doi.org/10.3390/mi13111961

M3 - Article

SN - 2072-666X

VL - 13

JO - Micromachines

JF - Micromachines

IS - 11

ER -