Abstract
SAW-MEMS microphone which operation principle is based on electrical field distortion of SAW is proposed. Simulation results of microphone sensitivity performed using COMSOL software are presented. Proposed SAW - MEMS microphone also can be used as a wireless passive accelerometer and pressure sensor. Realization of this device look challenging for MEMs technology.
Originalsprache | Englisch |
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Titel | Passive wireless SAW - MEMS pressure sensor/microphone |
ISBN (elektronisch) | 978-1-4799-5252-6 |
DOIs | |
Publikationsstatus | Veröffentlicht - 19 Nov. 2015 |
Veranstaltung | 2014 European Frequency and Time Forum - Neuchatel, Schweiz Dauer: 23 Juni 2014 → 26 Juni 2014 |
Konferenz
Konferenz | 2014 European Frequency and Time Forum |
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Kurztitel | EFTF |
Land/Gebiet | Schweiz |
Ort | Neuchatel |
Zeitraum | 23/06/14 → 26/06/14 |