Passive wireless SAW-MEMS pressure sensor/microphone

Vladimir Pashchenko; Kirill  Stroganov; Vladimir Kalinin; Victor Plessky

doi:10.1109/EFTF.2014.7331449

Passive wireless SAW-MEMS pressure sensor/microphone

Vladimir Pashchenko, Kirill Stroganov, Vladimir Kalinin, Victor Plessky

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

SAW-MEMS microphone which operation principle is based on electrical field distortion of SAW is proposed. Simulation results of microphone sensitivity performed using COMSOL software are presented. Proposed SAW - MEMS microphone also can be used as a wireless passive accelerometer and pressure sensor. Realization of this device look challenging for MEMs technology.

Original language	English
Title of host publication	Passive wireless SAW - MEMS pressure sensor/microphone
ISBN (Electronic)	978-1-4799-5252-6
DOIs	https://doi.org/10.1109/EFTF.2014.7331449
Publication status	Published - 19 Nov 2015
Event	2014 European Frequency and Time Forum - Neuchatel, Switzerland Duration: 23 Jun 2014 → 26 Jun 2014

Conference

Conference	2014 European Frequency and Time Forum
Abbreviated title	EFTF
Country/Territory	Switzerland
City	Neuchatel
Period	23/06/14 → 26/06/14

Keywords

wireless sensor
MEMS
SAW
passive sensor
pressure sensor
microphone

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10.1109/EFTF.2014.7331449

Cite this

@inproceedings{ec8f3856dad24dfb94232bb287058fa8,

title = "Passive wireless SAW-MEMS pressure sensor/microphone",

abstract = "SAW-MEMS microphone which operation principle is based on electrical field distortion of SAW is proposed. Simulation results of microphone sensitivity performed using COMSOL software are presented. Proposed SAW - MEMS microphone also can be used as a wireless passive accelerometer and pressure sensor. Realization of this device look challenging for MEMs technology.",

keywords = "wireless sensor, MEMS, SAW, passive sensor, pressure sensor, microphone",

author = "Vladimir Pashchenko and Kirill Stroganov and Vladimir Kalinin and Victor Plessky",

year = "2015",

month = nov,

day = "19",

doi = "10.1109/EFTF.2014.7331449",

language = "English",

booktitle = "Passive wireless SAW - MEMS pressure sensor/microphone",

note = " 2014 European Frequency and Time Forum , EFTF ; Conference date: 23-06-2014 Through 26-06-2014",

}

TY - GEN

T1 - Passive wireless SAW-MEMS pressure sensor/microphone

AU - Pashchenko, Vladimir

AU - Stroganov, Kirill

AU - Kalinin, Vladimir

AU - Plessky, Victor

PY - 2015/11/19

Y1 - 2015/11/19

N2 - SAW-MEMS microphone which operation principle is based on electrical field distortion of SAW is proposed. Simulation results of microphone sensitivity performed using COMSOL software are presented. Proposed SAW - MEMS microphone also can be used as a wireless passive accelerometer and pressure sensor. Realization of this device look challenging for MEMs technology.

AB - SAW-MEMS microphone which operation principle is based on electrical field distortion of SAW is proposed. Simulation results of microphone sensitivity performed using COMSOL software are presented. Proposed SAW - MEMS microphone also can be used as a wireless passive accelerometer and pressure sensor. Realization of this device look challenging for MEMs technology.

KW - wireless sensor

KW - MEMS

KW - SAW

KW - passive sensor

KW - pressure sensor

KW - microphone

U2 - 10.1109/EFTF.2014.7331449

DO - 10.1109/EFTF.2014.7331449

M3 - Conference Paper

BT - Passive wireless SAW - MEMS pressure sensor/microphone

T2 - 2014 European Frequency and Time Forum

Y2 - 23 June 2014 through 26 June 2014

ER -

Passive wireless SAW-MEMS pressure sensor/microphone

Abstract

Conference

Keywords

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