Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

Adrien Piot; Jaka Pribosek; Jordan Maufay; Johannes Schicker; Andreas Tortschanoff; Ramin Matloub; Paul Muralt; Mohssen Moridi

doi:10.1109/JMEMS.2021.3054357

Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

Adrien Piot, Jaka Pribosek, Jordan Maufay, Johannes Schicker, Andreas Tortschanoff, Ramin Matloub, Paul Muralt, Mohssen Moridi

Photonic Systems (PHOS)

Publikation: Beitrag in Fachzeitschrift › Artikel › Begutachtung

Originalsprache	Englisch
Seiten (von - bis)	216-223
Fachzeitschrift	Journal of Microelectromechanical Systems
Jahrgang	30
Ausgabenummer	2
DOIs	https://doi.org/10.1109/JMEMS.2021.3054357
Publikationsstatus	Veröffentlicht - 1 Apr. 2021

Zugriff auf Dokument

10.1109/JMEMS.2021.3054357

https://ieeexplore.ieee.org/document/9345346/

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AU - Tortschanoff, Andreas

AU - Matloub, Ramin

AU - Muralt, Paul

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