Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

Adrien Piot, Jaka Pribosek, Jordan Maufay, Johannes Schicker, Andreas Tortschanoff, Ramin Matloub, Paul Muralt, Mohssen Moridi

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)216-223
JournalJournal of Microelectromechanical Systems
Issue number2
Publication statusPublished - 1 Apr 2021

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