Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

Adrien Piot; Jaka Pribosek; Jordan Maufay; Johannes Schicker; Andreas Tortschanoff; Ramin Matloub; Paul Muralt; Mohssen Moridi

doi:10.1109/JMEMS.2021.3054357

Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation

Adrien Piot, Jaka Pribosek, Jordan Maufay, Johannes Schicker, Andreas Tortschanoff, Ramin Matloub, Paul Muralt, Mohssen Moridi

Photonic Systems (PHOS)

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	216-223
Journal	Journal of Microelectromechanical Systems
Volume	30
Issue number	2
DOIs	https://doi.org/10.1109/JMEMS.2021.3054357
Publication status	Published - 1 Apr 2021

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10.1109/JMEMS.2021.3054357

https://ieeexplore.ieee.org/document/9345346/

Cite this

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title = "Optimization of Resonant PZT MEMS Mirrors by Inverse Design and Electrode Segmentation",

author = "Adrien Piot and Jaka Pribosek and Jordan Maufay and Johannes Schicker and Andreas Tortschanoff and Ramin Matloub and Paul Muralt and Mohssen Moridi",

year = "2021",

month = apr,

day = "1",

doi = "10.1109/JMEMS.2021.3054357",

language = "English",

volume = "30",

pages = "216--223",

number = "2",

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AU - Piot, Adrien

AU - Pribosek, Jaka

AU - Maufay, Jordan

AU - Schicker, Johannes

AU - Tortschanoff, Andreas

AU - Matloub, Ramin

AU - Muralt, Paul

AU - Moridi, Mohssen

PY - 2021/4/1

Y1 - 2021/4/1

U2 - 10.1109/JMEMS.2021.3054357

DO - 10.1109/JMEMS.2021.3054357

M3 - Article

SN - 1057-7157

VL - 30

SP - 216

EP - 223

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 2

ER -