Abstract
We present the concept and design, and we report on the experimental performance of a broadband Variable Optical Attenuator (VOA) for integration with large-core rectangular multimode waveguides. Operation of an individual 221 μm × 111 μm optical waveguide channel employing a MEMS actuated dual-shutter to continuously modulate the intensity of the optical input signal is demonstrated experimentally. The MEMS actuated dual-shutter is fabricated in a 211 μm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow a displacement of more than 63 μm at 86 V, resulting in a continuously tunable attenuator efficiency of up to 99.97% at an operating wavelength of 532 nm with a reconfiguration time
Originalsprache | Englisch |
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Titel | 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) |
Seiten | 961-963 |
Seitenumfang | 3 |
DOIs | |
Publikationsstatus | Veröffentlicht - 29 Jän. 2021 |
Extern publiziert | Ja |
Veranstaltung | 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Gainesville, FL, USA Dauer: 25 Jän. 2021 → 29 Jän. 2021 |
Konferenz
Konferenz | 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) |
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Zeitraum | 25/01/21 → 29/01/21 |