MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides

Anton Lagosh; Benedikt Guldimann; Gergely Huszka; Hamed Sattari; Berit Ahlers; Grégoire Kerr; Mauro Melozzi; Peyman Rahnama; Takeshi Nishizawa; Niels Quack

doi:10.1109/MEMS51782.2021.9375396

MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides

Anton Lagosh, Benedikt Guldimann, Gergely Huszka, Hamed Sattari, Berit Ahlers, Grégoire Kerr, Mauro Melozzi, Peyman Rahnama, Takeshi Nishizawa, Niels Quack

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

We present the concept and design, and we report on the experimental performance of a broadband Variable Optical Attenuator (VOA) for integration with large-core rectangular multimode waveguides. Operation of an individual 221 μm × 111 μm optical waveguide channel employing a MEMS actuated dual-shutter to continuously modulate the intensity of the optical input signal is demonstrated experimentally. The MEMS actuated dual-shutter is fabricated in a 211 μm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow a displacement of more than 63 μm at 86 V, resulting in a continuously tunable attenuator efficiency of up to 99.97% at an operating wavelength of 532 nm with a reconfiguration time

Original language	English
Title of host publication	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Pages	961-963
Number of pages	3
DOIs	https://doi.org/10.1109/MEMS51782.2021.9375396
Publication status	Published - 29 Jan 2021
Externally published	Yes
Event	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) - Gainesville, FL, USA Duration: 25 Jan 2021 → 29 Jan 2021

Conference

Conference	2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Period	25/01/21 → 29/01/21

Keywords

Micromechanical devices
Optical fibers
Shape
Optical device fabrication
Optical attenuators
Rectangular waveguides
Optical waveguides

Access to Document

10.1109/MEMS51782.2021.9375396

https://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=9375396

Cite this

Lagosh, A., Guldimann, B., Huszka, G., Sattari, H., Ahlers, B., Kerr, G., Melozzi, M., Rahnama, P., Nishizawa, T., & Quack, N. (2021). MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides. In 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) (pp. 961-963). Article 9375396 https://doi.org/10.1109/MEMS51782.2021.9375396

@inproceedings{f886e7d50076476c8bc954ca7aba0b0e,

title = "MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides",

abstract = "We present the concept and design, and we report on the experimental performance of a broadband Variable Optical Attenuator (VOA) for integration with large-core rectangular multimode waveguides. Operation of an individual 221 μm × 111 μm optical waveguide channel employing a MEMS actuated dual-shutter to continuously modulate the intensity of the optical input signal is demonstrated experimentally. The MEMS actuated dual-shutter is fabricated in a 211 μm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow a displacement of more than 63 μm at 86 V, resulting in a continuously tunable attenuator efficiency of up to 99.97% at an operating wavelength of 532 nm with a reconfiguration time ",

keywords = "Micromechanical devices, Optical fibers, Shape, Optical device fabrication, Optical attenuators, Rectangular waveguides, Optical waveguides",

author = "Anton Lagosh and Benedikt Guldimann and Gergely Huszka and Hamed Sattari and Berit Ahlers and Gr{\'e}goire Kerr and Mauro Melozzi and Peyman Rahnama and Takeshi Nishizawa and Niels Quack",

year = "2021",

month = jan,

day = "29",

doi = "10.1109/MEMS51782.2021.9375396",

language = "English",

isbn = "978-1-6654-3024-1",

pages = "961--963",

booktitle = "2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)",

note = "2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS) ; Conference date: 25-01-2021 Through 29-01-2021",

}

Lagosh, A, Guldimann, B, Huszka, G, Sattari, H, Ahlers, B, Kerr, G, Melozzi, M, Rahnama, P, Nishizawa, T & Quack, N 2021, MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides. in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)., 9375396, pp. 961-963, 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), 25/01/21. https://doi.org/10.1109/MEMS51782.2021.9375396

MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides. / Lagosh, Anton; Guldimann, Benedikt; Huszka, Gergely et al.
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). 2021. p. 961-963 9375396.

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

TY - GEN

T1 - MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides

AU - Lagosh, Anton

AU - Guldimann, Benedikt

AU - Huszka, Gergely

AU - Sattari, Hamed

AU - Ahlers, Berit

AU - Kerr, Grégoire

AU - Melozzi, Mauro

AU - Rahnama, Peyman

AU - Nishizawa, Takeshi

AU - Quack, Niels

PY - 2021/1/29

Y1 - 2021/1/29

N2 - We present the concept and design, and we report on the experimental performance of a broadband Variable Optical Attenuator (VOA) for integration with large-core rectangular multimode waveguides. Operation of an individual 221 μm × 111 μm optical waveguide channel employing a MEMS actuated dual-shutter to continuously modulate the intensity of the optical input signal is demonstrated experimentally. The MEMS actuated dual-shutter is fabricated in a 211 μm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow a displacement of more than 63 μm at 86 V, resulting in a continuously tunable attenuator efficiency of up to 99.97% at an operating wavelength of 532 nm with a reconfiguration time

AB - We present the concept and design, and we report on the experimental performance of a broadband Variable Optical Attenuator (VOA) for integration with large-core rectangular multimode waveguides. Operation of an individual 221 μm × 111 μm optical waveguide channel employing a MEMS actuated dual-shutter to continuously modulate the intensity of the optical input signal is demonstrated experimentally. The MEMS actuated dual-shutter is fabricated in a 211 μm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow a displacement of more than 63 μm at 86 V, resulting in a continuously tunable attenuator efficiency of up to 99.97% at an operating wavelength of 532 nm with a reconfiguration time

KW - Micromechanical devices

KW - Optical fibers

KW - Shape

KW - Optical device fabrication

KW - Optical attenuators

KW - Rectangular waveguides

KW - Optical waveguides

UR - https://ieeexplore.ieee.org/document/9375396/

U2 - 10.1109/MEMS51782.2021.9375396

DO - 10.1109/MEMS51782.2021.9375396

M3 - Conference Paper

SN - 978-1-6654-3024-1

SP - 961

EP - 963

BT - 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

T2 - 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)

Y2 - 25 January 2021 through 29 January 2021

ER -

MEMS Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides

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Keywords

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