Abstract
The discovery of enhanced piezoelectricity in solid
solutions of AlN and ScN is certainly one of the most important
events in piezoelectric MEMS. As compared to pure AlN, it
brought a crucial factor 2 to 3 improvement in a number of figures
of merit governing the performance of MEMS devices. The aim of
this contribution is to give a short overview on actual topics in
processing, properties, and applications in RF filters and sensors.
solutions of AlN and ScN is certainly one of the most important
events in piezoelectric MEMS. As compared to pure AlN, it
brought a crucial factor 2 to 3 improvement in a number of figures
of merit governing the performance of MEMS devices. The aim of
this contribution is to give a short overview on actual topics in
processing, properties, and applications in RF filters and sensors.
| Originalsprache | Englisch |
|---|---|
| Titel | Growth, Properties, and Applications of Al1-xScxN Thin Films |
| Seiten | 255-257 |
| Seitenumfang | 3 |
| DOIs | |
| Publikationsstatus | Veröffentlicht - 2019 |
| Veranstaltung | 2019 IEEE International Ultrasonics Symposium (IUS) - Glasgow, Großbritannien/Vereinigtes Königreich Dauer: 6 Okt. 2019 → 9 Okt. 2019 |
Konferenz
| Konferenz | 2019 IEEE International Ultrasonics Symposium (IUS) |
|---|---|
| Land/Gebiet | Großbritannien/Vereinigtes Königreich |
| Ort | Glasgow |
| Zeitraum | 6/10/19 → 9/10/19 |