Growth, Properties, and Applications of Al1-xScxN Thin Films

Paul Muralt; Vladimir Pashchenko; Fazel  Parsapour; Stefan  Mertin; Bernd  Heinz; Pascal Nicolay

doi:10.1109/ULTSYM.2019.8926081

Growth, Properties, and Applications of Al1-xScxN Thin Films

Paul Muralt, Vladimir Pashchenko, Fazel Parsapour, Stefan Mertin, Bernd Heinz, Pascal Nicolay

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

The discovery of enhanced piezoelectricity in solid
solutions of AlN and ScN is certainly one of the most important
events in piezoelectric MEMS. As compared to pure AlN, it
brought a crucial factor 2 to 3 improvement in a number of figures
of merit governing the performance of MEMS devices. The aim of
this contribution is to give a short overview on actual topics in
processing, properties, and applications in RF filters and sensors.

Original language	English
Title of host publication	Growth, Properties, and Applications of Al1-xScxN Thin Films
Pages	255-257
Number of pages	3
DOIs	https://doi.org/10.1109/ULTSYM.2019.8926081
Publication status	Published - 2019
Event	2019 IEEE International Ultrasonics Symposium (IUS) - Glasgow, United Kingdom Duration: 6 Oct 2019 → 9 Oct 2019

Conference

Conference	2019 IEEE International Ultrasonics Symposium (IUS)
Country/Territory	United Kingdom
City	Glasgow
Period	6/10/19 → 9/10/19

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10.1109/ULTSYM.2019.8926081

Cite this

@inproceedings{cb2a8e51b43847468817ff9c5ad8b32a,

title = "Growth, Properties, and Applications of Al1-xScxN Thin Films",

abstract = "The discovery of enhanced piezoelectricity in solidsolutions of AlN and ScN is certainly one of the most importantevents in piezoelectric MEMS. As compared to pure AlN, itbrought a crucial factor 2 to 3 improvement in a number of figuresof merit governing the performance of MEMS devices. The aim ofthis contribution is to give a short overview on actual topics inprocessing, properties, and applications in RF filters and sensors.",

author = "Paul Muralt and Vladimir Pashchenko and Fazel Parsapour and Stefan Mertin and Bernd Heinz and Pascal Nicolay",

year = "2019",

doi = "10.1109/ULTSYM.2019.8926081",

language = "English",

pages = "255--257",

booktitle = "Growth, Properties, and Applications of Al1-xScxN Thin Films",

note = "2019 IEEE International Ultrasonics Symposium (IUS) ; Conference date: 06-10-2019 Through 09-10-2019",

}

TY - GEN

T1 - Growth, Properties, and Applications of Al1-xScxN Thin Films

AU - Muralt, Paul

AU - Pashchenko, Vladimir

AU - Parsapour, Fazel

AU - Mertin, Stefan

AU - Heinz, Bernd

AU - Nicolay, Pascal

PY - 2019

Y1 - 2019

N2 - The discovery of enhanced piezoelectricity in solidsolutions of AlN and ScN is certainly one of the most importantevents in piezoelectric MEMS. As compared to pure AlN, itbrought a crucial factor 2 to 3 improvement in a number of figuresof merit governing the performance of MEMS devices. The aim ofthis contribution is to give a short overview on actual topics inprocessing, properties, and applications in RF filters and sensors.

AB - The discovery of enhanced piezoelectricity in solidsolutions of AlN and ScN is certainly one of the most importantevents in piezoelectric MEMS. As compared to pure AlN, itbrought a crucial factor 2 to 3 improvement in a number of figuresof merit governing the performance of MEMS devices. The aim ofthis contribution is to give a short overview on actual topics inprocessing, properties, and applications in RF filters and sensors.

U2 - 10.1109/ULTSYM.2019.8926081

DO - 10.1109/ULTSYM.2019.8926081

M3 - Conference Paper

SP - 255

EP - 257

BT - Growth, Properties, and Applications of Al1-xScxN Thin Films

T2 - 2019 IEEE International Ultrasonics Symposium (IUS)

Y2 - 6 October 2019 through 9 October 2019

ER -

Growth, Properties, and Applications of Al1-xScxN Thin Films

Abstract

Conference

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