TY - JOUR
T1 - Fabrication and characterization of sub-μm magnetic cells for embedded front-end MRAM
AU - Dimopoulos, T.
AU - Schotter, J.
AU - Uhrmann, T.
AU - Wiese, N.
AU - Heer, R.
AU - Stepper, C.
AU - Kast, M.
AU - Brückl, H.
N1 - cited By 0
PY - 2007
Y1 - 2007
N2 - In this work we study the magnetic properties of 4-nm-thick permalloy films deposited into flat elliptical holes with an aspect ratio of 2:1 and short axis ranging from 2000 down to 70 nm. The holes are patterned into 50- and 200-nm-thick SiO2 dielectric by e-beam lithography. The magnetization switching characteristics of the embedded magnetic elements were probed by localized magneto-optical Kerr effect and magnetic force microscopy measurements. It is shown that the switching mode, field and distribution depend on the hole depth and very strongly on the element's size, especially when the short axis shrinks below 100 nm. The results are compared with micromagnetic simulations. © 2007 Elsevier B.V. All rights reserved.
AB - In this work we study the magnetic properties of 4-nm-thick permalloy films deposited into flat elliptical holes with an aspect ratio of 2:1 and short axis ranging from 2000 down to 70 nm. The holes are patterned into 50- and 200-nm-thick SiO2 dielectric by e-beam lithography. The magnetization switching characteristics of the embedded magnetic elements were probed by localized magneto-optical Kerr effect and magnetic force microscopy measurements. It is shown that the switching mode, field and distribution depend on the hole depth and very strongly on the element's size, especially when the short axis shrinks below 100 nm. The results are compared with micromagnetic simulations. © 2007 Elsevier B.V. All rights reserved.
KW - Fabrication
KW - Intermetallics
KW - Magnetic force microscopy
KW - Magnetic permeability
KW - Magnetization reversal
KW - Embedded magnetic elements
KW - Magnetic cells
KW - Magnetization switching
KW - Permalloy
KW - Random access storage
U2 - 10.1016/j.jmmm.2007.03.149
DO - 10.1016/j.jmmm.2007.03.149
M3 - Article
SN - 0304-8853
VL - 316
SP - e948-e952
JO - Journal of Magnetism and Magnetic Materials
JF - Journal of Magnetism and Magnetic Materials
IS - 2 SPEC. ISS.
ER -