Device with a gripper for handling of plates

Gerhard Kroupa; Alfred Binder; Josef Unterweger; Martin Matschitsch

Device with a gripper for handling of plates

Gerhard Kroupa (Erfinder/-in), Alfred Binder (Erfinder/-in), Josef Unterweger (Erfinder/-in), Martin Matschitsch (Erfinder/-in)

Photonic Systems (PHOS)

Publikation: Schutzrecht › Patent

Abstract

The invention relates to a device with a gripper for the handling of sheets, in particular for handling of thin wafers with a receiving plate with nozzle bores for generating a hydrodynamic negative pressure, wherein the receiving plate has mechanical end stops which engage on the ojbect to handle and fix it in position.

Originalsprache	Englisch
Veröffentlichungsnummer	DE10144409A1
Publikationsstatus	Veröffentlicht - Sep. 2001

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title = "Device with a gripper for handling of plates",

abstract = "The invention relates to a device with a gripper for the handling of sheets, in particular for handling of thin wafers with a receiving plate with nozzle bores for generating a hydrodynamic negative pressure, wherein the receiving plate has mechanical end stops which engage on the ojbect to handle and fix it in position.",

author = "Gerhard Kroupa and Alfred Binder and Josef Unterweger and Martin Matschitsch",

year = "2001",

month = sep,

language = "English",

type = "Patent",

note = "DE10144409A1",

}

TY - PAT

T1 - Device with a gripper for handling of plates

AU - Kroupa, Gerhard

AU - Binder, Alfred

AU - Unterweger, Josef

AU - Matschitsch, Martin

PY - 2001/9

Y1 - 2001/9

N2 - The invention relates to a device with a gripper for the handling of sheets, in particular for handling of thin wafers with a receiving plate with nozzle bores for generating a hydrodynamic negative pressure, wherein the receiving plate has mechanical end stops which engage on the ojbect to handle and fix it in position.

AB - The invention relates to a device with a gripper for the handling of sheets, in particular for handling of thin wafers with a receiving plate with nozzle bores for generating a hydrodynamic negative pressure, wherein the receiving plate has mechanical end stops which engage on the ojbect to handle and fix it in position.

M3 - Patent

M1 - DE10144409A1

ER -

Device with a gripper for handling of plates

Abstract

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Dieses zitieren