Device with a gripper for handling of plates

Gerhard Kroupa; Alfred Binder; Josef Unterweger; Martin Matschitsch

Device with a gripper for handling of plates

Gerhard Kroupa (Inventor), Alfred Binder (Inventor), Josef Unterweger (Inventor), Martin Matschitsch (Inventor)

Photonic Systems (PHOS)

Research output: Patent

Abstract

The invention relates to a device with a gripper for the handling of sheets, in particular for handling of thin wafers with a receiving plate with nozzle bores for generating a hydrodynamic negative pressure, wherein the receiving plate has mechanical end stops which engage on the ojbect to handle and fix it in position.

Original language	English
Patent number	DE10144409A1
Publication status	Published - Sept 2001

Cite this

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title = "Device with a gripper for handling of plates",

abstract = "The invention relates to a device with a gripper for the handling of sheets, in particular for handling of thin wafers with a receiving plate with nozzle bores for generating a hydrodynamic negative pressure, wherein the receiving plate has mechanical end stops which engage on the ojbect to handle and fix it in position.",

author = "Gerhard Kroupa and Alfred Binder and Josef Unterweger and Martin Matschitsch",

year = "2001",

month = sep,

language = "English",

type = "Patent",

note = "DE10144409A1",

}

TY - PAT

T1 - Device with a gripper for handling of plates

AU - Kroupa, Gerhard

AU - Binder, Alfred

AU - Unterweger, Josef

AU - Matschitsch, Martin

PY - 2001/9

Y1 - 2001/9

N2 - The invention relates to a device with a gripper for the handling of sheets, in particular for handling of thin wafers with a receiving plate with nozzle bores for generating a hydrodynamic negative pressure, wherein the receiving plate has mechanical end stops which engage on the ojbect to handle and fix it in position.

AB - The invention relates to a device with a gripper for the handling of sheets, in particular for handling of thin wafers with a receiving plate with nozzle bores for generating a hydrodynamic negative pressure, wherein the receiving plate has mechanical end stops which engage on the ojbect to handle and fix it in position.

M3 - Patent

M1 - DE10144409A1

ER -

Device with a gripper for handling of plates

Abstract

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