@inbook{5436081b6c264469b5bcc24a29bc2226,
title = "Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance",
abstract = "This paper presents a novel PMUT integrated with a central circular and an annular diaphragms. Compared with the traditional PMUT with circular diaphragm, the proposed PMUT had the advantages that (1) it had an ultra-high ultrasonic emission power output and (2) it achieved much higher emission performance when working in array mode due to its reduced cross talk characteristics. Two different dimensions were presented for the proposed PMUT with the work frequencies of 9.8MHz and 6.3MHz, respectively. And the emission sensitivity of proposed PMUT shown a remarkable increase compared with the traditional circular PMUT in water.",
keywords = "PMUT, array mode, low cross talk, sensitivity, ultra-high emission performance",
author = "Tingzhong Xu and Libo Zhao and Zhuangde Jiang and Zhiwei Cui and Jiawang Zhang and Jie Li and Zhikang Li and Yihe Zhao",
year = "2018",
month = dec,
day = "3",
doi = "10.1109/NEMS.2018.8556899",
language = "English",
isbn = "9781538652732",
series = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "151--154",
booktitle = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",
address = "United States",
}