Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance

Tingzhong Xu; Libo Zhao; Zhuangde Jiang; Zhiwei Cui; Jiawang Zhang; Jie Li; Zhikang Li; Yihe Zhao

doi:10.1109/NEMS.2018.8556899

Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance

Tingzhong Xu, Libo Zhao, Zhuangde Jiang, Zhiwei Cui, Jiawang Zhang, Jie Li, Zhikang Li, Yihe Zhao

Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

Abstract

This paper presents a novel PMUT integrated with a central circular and an annular diaphragms. Compared with the traditional PMUT with circular diaphragm, the proposed PMUT had the advantages that (1) it had an ultra-high ultrasonic emission power output and (2) it achieved much higher emission performance when working in array mode due to its reduced cross talk characteristics. Two different dimensions were presented for the proposed PMUT with the work frequencies of 9.8MHz and 6.3MHz, respectively. And the emission sensitivity of proposed PMUT shown a remarkable increase compared with the traditional circular PMUT in water.

Original language	English
Title of host publication	NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	151-154
Number of pages	4
ISBN (Print)	9781538652732
DOIs	https://doi.org/10.1109/NEMS.2018.8556899
Publication status	Published - 3 Dec 2018

Publication series

Name	NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Keywords

PMUT
array mode
low cross talk
sensitivity
ultra-high emission performance

Access to Document

10.1109/NEMS.2018.8556899

Cite this

Xu, T., Zhao, L., Jiang, Z., Cui, Z., Zhang, J., Li, J., Li, Z., & Zhao, Y. (2018). Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance. In NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 151-154). (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/NEMS.2018.8556899

Xu, Tingzhong ; Zhao, Libo ; Jiang, Zhuangde et al. / Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance. NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., 2018. pp. 151-154 (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

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title = "Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance",

abstract = "This paper presents a novel PMUT integrated with a central circular and an annular diaphragms. Compared with the traditional PMUT with circular diaphragm, the proposed PMUT had the advantages that (1) it had an ultra-high ultrasonic emission power output and (2) it achieved much higher emission performance when working in array mode due to its reduced cross talk characteristics. Two different dimensions were presented for the proposed PMUT with the work frequencies of 9.8MHz and 6.3MHz, respectively. And the emission sensitivity of proposed PMUT shown a remarkable increase compared with the traditional circular PMUT in water.",

keywords = "PMUT, array mode, low cross talk, sensitivity, ultra-high emission performance",

author = "Tingzhong Xu and Libo Zhao and Zhuangde Jiang and Zhiwei Cui and Jiawang Zhang and Jie Li and Zhikang Li and Yihe Zhao",

year = "2018",

month = dec,

day = "3",

doi = "10.1109/NEMS.2018.8556899",

language = "English",

isbn = "9781538652732",

series = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "151--154",

booktitle = "NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

address = "United States",

}

Xu, T, Zhao, L, Jiang, Z, Cui, Z, Zhang, J, Li, J, Li, Z & Zhao, Y 2018, Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance. in NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Institute of Electrical and Electronics Engineers Inc., pp. 151-154. https://doi.org/10.1109/NEMS.2018.8556899

Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance. / Xu, Tingzhong; Zhao, Libo; Jiang, Zhuangde et al.
NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc., 2018. p. 151-154 (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Conference proceeding/Chapter in Book/Report/ › Chapter › peer-review

TY - CHAP

T1 - Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance

AU - Xu, Tingzhong

AU - Zhao, Libo

AU - Jiang, Zhuangde

AU - Cui, Zhiwei

AU - Zhang, Jiawang

AU - Li, Jie

AU - Li, Zhikang

AU - Zhao, Yihe

PY - 2018/12/3

Y1 - 2018/12/3

N2 - This paper presents a novel PMUT integrated with a central circular and an annular diaphragms. Compared with the traditional PMUT with circular diaphragm, the proposed PMUT had the advantages that (1) it had an ultra-high ultrasonic emission power output and (2) it achieved much higher emission performance when working in array mode due to its reduced cross talk characteristics. Two different dimensions were presented for the proposed PMUT with the work frequencies of 9.8MHz and 6.3MHz, respectively. And the emission sensitivity of proposed PMUT shown a remarkable increase compared with the traditional circular PMUT in water.

AB - This paper presents a novel PMUT integrated with a central circular and an annular diaphragms. Compared with the traditional PMUT with circular diaphragm, the proposed PMUT had the advantages that (1) it had an ultra-high ultrasonic emission power output and (2) it achieved much higher emission performance when working in array mode due to its reduced cross talk characteristics. Two different dimensions were presented for the proposed PMUT with the work frequencies of 9.8MHz and 6.3MHz, respectively. And the emission sensitivity of proposed PMUT shown a remarkable increase compared with the traditional circular PMUT in water.

KW - PMUT

KW - array mode

KW - low cross talk

KW - sensitivity

KW - ultra-high emission performance

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DO - 10.1109/NEMS.2018.8556899

M3 - Chapter

SN - 9781538652732

T3 - NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

SP - 151

EP - 154

BT - NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Xu T, Zhao L, Jiang Z, Cui Z, Zhang J, Li J et al. Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance. In NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Institute of Electrical and Electronics Engineers Inc. 2018. p. 151-154. (NEMS 2018 - 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems). doi: 10.1109/NEMS.2018.8556899

Coupled piezoelectric micromachined ultrasonic transducers array with high ultrasonic emission performance

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