Actuation And Sensing For PZT Micromirrors Using d33 Mode Directional Interdigitated Electrodes

This work explores the use of directional interdigitated electrodes leveraging 𝒅𝟑𝟑 mode polarization for mode-selective actuation and sensing of micromirrors. To this end, a direct torsional actuation is achieved by 45° directional interdigitated electrodes and boosted by mechanical amplification. The torsion mode response is improved by 23% by poling the PZT layer in favor of the actuation mode. The 𝒅𝟑𝟑 sensing scheme also proves to be 63x better than 𝒅𝟑𝟏 sensing scheme for torsion mode and 90x better for bending mode. This demonstrates new flexibility in the design of next generation piezo MEMS actuators.