A novel interferometric characterization technique for 3D analyses at high pressures and temperatures

Physik & Astronomy

• characterization 100%
• microelectromechanical systems 87%
• topography 83%
• glass 78%
• interferometers 72%
• microoptoelectromechanical systems 63%
• elastic deformation 51%
• optical measurement 45%
• oils 40%
• temperature 39%
• performance 39%
• modules 37%
• methodology 36%
• chambers 35%
• plastics 34%
• lenses 33%
• microstructure 26%
• water 25%
• liquids 23%