Physik & Astronomy
actuation
47%
actuators
6%
air
26%
atmospheric pressure
39%
characterization
33%
chips
35%
cycles
29%
damping
35%
deflection
6%
diffractive optics
60%
electrodes
27%
energy
13%
excitation
7%
fabrication
9%
field of view
6%
figure of merit
14%
finite element method
6%
flexibility
6%
frequency response
86%
gimbals
9%
harmonics
28%
holography
87%
hysteresis
14%
membranes
21%
microelectromechanical systems
64%
microscopy
35%
mirrors
100%
modulation transfer function
15%
phase shift
6%
piezoelectric actuators
18%
point spread functions
8%
projection
35%
Q factors
39%
range (extremes)
7%
reinforcement
47%
resonant frequencies
13%
scanning
42%
simulation
20%
static deformation
74%
thin films
7%
torsion
14%
vacuum
28%
Ingenieurwesen & Materialwissenschaft
Absorption spectroscopy
17%
Air quality
12%
Aluminum nitride
16%
Damping
8%
Evanescent fields
19%
Fabrication
33%
Gases
6%
Geometry
6%
Greenhouses
13%
Infrared absorption
71%
Infrared detectors
16%
Infrared radiation
19%
Monitoring
6%
Polysilicon
51%
Sensors
23%
Waveguides
45%