Physik & Astronomy
mirrors
100%
holography
87%
frequency response
86%
static deformation
74%
microelectromechanical systems
64%
diffractive optics
60%
reinforcement
47%
actuation
47%
scanning
42%
atmospheric pressure
39%
Q factors
39%
microscopy
35%
projection
35%
damping
35%
chips
35%
characterization
33%
cycles
29%
vacuum
28%
harmonics
28%
electrodes
27%
air
26%
membranes
21%
simulation
20%
piezoelectric actuators
18%
modulation transfer function
15%
hysteresis
14%
torsion
14%
figure of merit
14%
resonant frequencies
13%
energy
13%
gimbals
9%
fabrication
9%
point spread functions
8%
thin films
7%
range (extremes)
7%
excitation
7%
field of view
6%
flexibility
6%
deflection
6%
phase shift
6%
finite element method
6%
actuators
6%
Ingenieurwesen & Materialwissenschaft
Infrared absorption
71%
Polysilicon
51%
Waveguides
45%
Fabrication
33%
Sensors
23%
Evanescent fields
19%
Infrared radiation
19%
Absorption spectroscopy
17%
Infrared detectors
16%
Aluminum nitride
16%
Greenhouses
13%
Air quality
12%
Damping
8%
Geometry
6%
Gases
6%
Monitoring
6%
