Physik & Astronomy
thin films
100%
nitrides
94%
hafnium
74%
seeds
74%
microstructure
74%
silicon oxides
63%
ellipsometry
59%
silicon nitrides
59%
solid solutions
49%
vapor deposition
46%
engineering
44%
microelectromechanical systems
42%
acoustics
38%
yttrium
38%
performance
33%
resonators
30%
oxides
29%
sputtering
28%
photonics
27%
atomic force microscopy
25%
interactions
24%
flattening
23%
wurtzite
22%
scanning electron microscopy
22%
transducers
21%
nanoindentation
20%
softening
19%
isolation
19%
transmission electron microscopy
17%
gradients
17%
low pressure
16%
modulus of elasticity
16%
electronics
15%
trends
15%
textures
15%
platforms
14%
CMOS
14%
permittivity
14%
phonons
13%
impurities
13%
optical properties
13%
filters
12%
augmentation
12%
high resolution
12%
fabrication
12%
oxygen
12%
oxynitrides
12%
chemical bonds
11%
diffraction
10%
tensile stress
10%
Ingenieurwesen & Materialwissenschaft
Thin films
57%
Resonators
56%
Film growth
48%
Acoustic waves
47%
Yttrium
43%
Carrier concentration
42%
Microstructure
40%
Atomic force microscopy
38%
Nitrides
36%
Nanoindentation
36%
Seed
31%
Transmission electron microscopy
31%
Permittivity
30%
X ray diffraction
29%
Multilayers
29%
Impurities
29%
Transducers
28%
Elastic moduli
25%
Acoustics
24%
Oxygen
24%
Scanning electron microscopy
23%
Fabrication
22%
Substrates
21%
Monitoring
17%
