Physik & Astronomy
acoustics
14%
actuation
29%
bolometers
13%
characterization
6%
chips
74%
CMOS
5%
composite materials
7%
contamination
21%
crystallization
9%
deviation
11%
elastic waves
10%
electric potential
6%
electrical resistivity
5%
electronics
6%
ellipsometry
23%
etching
21%
fabrication
14%
filters
5%
fluids
10%
flux density
18%
gas flow
7%
gases
26%
geometry
10%
hafnium
29%
harmonics
37%
heat generation
21%
high aspect ratio
25%
holders
20%
low frequencies
16%
low pressure
6%
membranes
17%
metal oxides
23%
microelectromechanical systems
40%
microstructure
15%
modes (standing waves)
9%
monitors
7%
nanofabrication
5%
nitrides
30%
nitrogen
5%
optical properties
5%
oxides
11%
paradoxes
12%
performance
18%
phonons
5%
photonics
27%
pixels
19%
platforms
14%
polymers
14%
resistors
8%
scandium
10%
seeds
22%
sensors
11%
shielding
7%
silicon
29%
silicon nitrides
46%
silicon oxides
25%
simulation
8%
sodium
21%
solid solutions
19%
sputtering
11%
temperature
12%
temperature gradients
10%
textures
6%
thin films
42%
transducers
100%
transition metals
20%
ultrasonics
18%
vacuum
7%
vapor deposition
18%
vibration mode
5%
wafers
8%
waveguides
16%
wavelengths
11%
wurtzite
8%
yttrium
6%