Varifocal MEMS for high-speed axial focusing: A review

Jaka Pribosek, Markus Bainschab, Takashi Sasaki

Research output: Contribution to journalArticlepeer-review

Abstract

Recent advances brought the performance of MEMS based varifocal mirrors to levels comparable to conventional ultra-high-speed focusing devices. Varifocal mirrors are becoming capable of high axial resolution exceeding 300 resolvable planes, can achieve microsecond response times, continuous operation in excess of several hundred \SI{}{\kilo\hertz} and can be designed to combine focusing with lateral steering in a single chip device. This survey summarizes the past 50 years of scientific progress in varifocal MEMS mirrors, providing the most comprehensive study in this field to date. We introduce a novel figure of merit for varifocal mirrors on basis of which we evaluate and compare nearly all reported devices from the literature. At the forefront of this review is the analysis of the advantages and shortcomings of various actuation technologies, as well as systematic study of methods to enhance the focusing performance in terms of speed, resolution, and shape fidelity. We believe this analysis will fuel the future way of technological developments towards reaching axial resolution of 1000 resolvable planes in next generation varifocal mirrors.
Original languageEnglish
JournalMicrosystems & Nanoengineering
Publication statusSubmitted - 2021

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