变频自聚焦混合驱动收发一体化pmut单元及其制备方法

Libo Zhao; Tingzhong Xu; Shuaishuai Guo; Zhikang Li; Ping Yang; Jie Li; Yihe Zhao; Zichen Liu; Zhuangde Jiang

变频自聚焦混合驱动收发一体化pmut单元及其制备方法

Translated title of the contribution: Transceiving integrated PMUT unit of frequency conversion self-focusing combination drive and preparation method

Libo Zhao (Inventor), Tingzhong Xu (Inventor), Shuaishuai Guo (Inventor), Zhikang Li (Inventor), Ping Yang (Inventor), Jie Li (Inventor), Yihe Zhao (Inventor), Zichen Liu (Inventor), Zhuangde Jiang (Inventor)

Research output: Patent

Abstract

The invention discloses transceiving integrated PMUT units of frequency conversion self-focusing combination drive and preparation method thereof, and the driving method for collapsing operating mode and PMUT unit of traditional CMUT unit is combined.In ultrasound emission state, it is in the fit-state that vibration film collapses region and sensor base by adjusting bias voltage control, realizes a wide range of regulation to vibration film rigidity.Meanwhile the structure design flexibility not constrained by cavity height in conjunction with PMUT output sensitivity, realize the frequency conversion high-energy ultrasonic output of PMUT unit.In ultrasonic reception state, incident ultrasound wave is perceived by capacitance change that each PMUT unit is under collapsed mode, so that the receiving sensitivity of sensor be greatly improved.

Translated title of the contribution	Transceiving integrated PMUT unit of frequency conversion self-focusing combination drive and preparation method
Original language	Chinese (Simplified)
Patent number	CN110518114A
Publication status	Published - 2019

Cite this

@misc{29d2a242557640909a8cca09bebf9cfe,

title = "变频自聚焦混合驱动收发一体化pmut单元及其制备方法",

abstract = "The invention discloses transceiving integrated PMUT units of frequency conversion self-focusing combination drive and preparation method thereof, and the driving method for collapsing operating mode and PMUT unit of traditional CMUT unit is combined.In ultrasound emission state, it is in the fit-state that vibration film collapses region and sensor base by adjusting bias voltage control, realizes a wide range of regulation to vibration film rigidity.Meanwhile the structure design flexibility not constrained by cavity height in conjunction with PMUT output sensitivity, realize the frequency conversion high-energy ultrasonic output of PMUT unit.In ultrasonic reception state, incident ultrasound wave is perceived by capacitance change that each PMUT unit is under collapsed mode, so that the receiving sensitivity of sensor be greatly improved.",

author = "Libo Zhao and Tingzhong Xu and Shuaishuai Guo and Zhikang Li and Ping Yang and Jie Li and Yihe Zhao and Zichen Liu and Zhuangde Jiang",

year = "2019",

language = "Chinesisch (vereinfacht)",

type = "Patent",

note = "CN110518114A",

}

TY - PAT

T1 - 变频自聚焦混合驱动收发一体化pmut单元及其制备方法

AU - Zhao, Libo

AU - Xu, Tingzhong

AU - Guo, Shuaishuai

AU - Li, Zhikang

AU - Yang, Ping

AU - Li, Jie

AU - Zhao, Yihe

AU - Liu, Zichen

AU - Jiang, Zhuangde

PY - 2019

Y1 - 2019

N2 - The invention discloses transceiving integrated PMUT units of frequency conversion self-focusing combination drive and preparation method thereof, and the driving method for collapsing operating mode and PMUT unit of traditional CMUT unit is combined.In ultrasound emission state, it is in the fit-state that vibration film collapses region and sensor base by adjusting bias voltage control, realizes a wide range of regulation to vibration film rigidity.Meanwhile the structure design flexibility not constrained by cavity height in conjunction with PMUT output sensitivity, realize the frequency conversion high-energy ultrasonic output of PMUT unit.In ultrasonic reception state, incident ultrasound wave is perceived by capacitance change that each PMUT unit is under collapsed mode, so that the receiving sensitivity of sensor be greatly improved.

AB - The invention discloses transceiving integrated PMUT units of frequency conversion self-focusing combination drive and preparation method thereof, and the driving method for collapsing operating mode and PMUT unit of traditional CMUT unit is combined.In ultrasound emission state, it is in the fit-state that vibration film collapses region and sensor base by adjusting bias voltage control, realizes a wide range of regulation to vibration film rigidity.Meanwhile the structure design flexibility not constrained by cavity height in conjunction with PMUT output sensitivity, realize the frequency conversion high-energy ultrasonic output of PMUT unit.In ultrasonic reception state, incident ultrasound wave is perceived by capacitance change that each PMUT unit is under collapsed mode, so that the receiving sensitivity of sensor be greatly improved.

UR - https://patents.google.com/patent/CN110518114A/en?inventor=%E5%BE%90%E5%BB%B7%E4%B8%AD&num=100

M3 - Patent

M1 - CN110518114A

ER -

变频自聚焦混合驱动收发一体化pmut单元及其制备方法

Abstract

Other files and links

Fingerprint

Cite this