Abstract
The invention discloses transceiving integrated PMUT units of frequency conversion self-focusing combination drive and preparation method thereof, and the driving method for collapsing operating mode and PMUT unit of traditional CMUT unit is combined.In ultrasound emission state, it is in the fit-state that vibration film collapses region and sensor base by adjusting bias voltage control, realizes a wide range of regulation to vibration film rigidity.Meanwhile the structure design flexibility not constrained by cavity height in conjunction with PMUT output sensitivity, realize the frequency conversion high-energy ultrasonic output of PMUT unit.In ultrasonic reception state, incident ultrasound wave is perceived by capacitance change that each PMUT unit is under collapsed mode, so that the receiving sensitivity of sensor be greatly improved.
Titel in Übersetzung | Transceiving integrated PMUT unit of frequency conversion self-focusing combination drive and preparation method |
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Originalsprache | Chinesisch (vereinfacht) |
Veröffentlichungsnummer | CN110518114A |
Publikationsstatus | Veröffentlicht - 2019 |