Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor

F. Bartoli; M. Moutaouekkil; J. Streque; P. Pigeat; S. Hage-Ali; P. Boulet; H. M'Jahed; O. Elmazria; S. Zhgoon; F. Bartoli; T. Aubert; O.B. Matar; A. Talbi

doi:10.1109/ICSENS.2017.8233938

Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor

F. Bartoli, M. Moutaouekkil, J. Streque, P. Pigeat, S. Hage-Ali, P. Boulet, H. M'Jahed, O. Elmazria, S. Zhgoon, F. Bartoli, T. Aubert, O.B. Matar, A. Talbi

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	American English
Title of host publication	Proceedings of IEEE Sensors
DOIs	https://doi.org/10.1109/ICSENS.2017.8233938
Publication status	Published - 2017

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10.1109/ICSENS.2017.8233938

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title = "Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor",

author = "F. Bartoli and M. Moutaouekkil and J. Streque and P. Pigeat and S. Hage-Ali and P. Boulet and H. M'Jahed and O. Elmazria and S. Zhgoon and F. Bartoli and T. Aubert and O.B. Matar and A. Talbi",

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language = "Englisch (Amerika)",

booktitle = "Proceedings of IEEE Sensors",

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TY - GEN

T1 - Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor

AU - Bartoli, F.

AU - Moutaouekkil, M.

AU - Streque, J.

AU - Pigeat, P.

AU - Hage-Ali, S.

AU - Boulet, P.

AU - M'Jahed, H.

AU - Elmazria, O.

AU - Zhgoon, S.

AU - Bartoli, F.

AU - Aubert, T.

AU - Matar, O.B.

AU - Talbi, A.

PY - 2017

Y1 - 2017

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85044255148&partnerID=MN8TOARS

U2 - 10.1109/ICSENS.2017.8233938

DO - 10.1109/ICSENS.2017.8233938

M3 - Konferenzartikel

BT - Proceedings of IEEE Sensors

ER -

Theoretical and experimental study of ScAlN/Sapphire structure based SAW sensor

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