Simulation of a Low Frequency Z-axis SU-8 Accelerometer in CoventorWare and MEMS+

Armando Arpys Arevalo Carreno, David Conchouso, Amir Zaher, Ian Foulds, King Abdullah University of Science Technology

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	English
Title of host publication	2013 UKSim 15th International Conference on Computer Modelling and Simulation
Pages	792-797
Number of pages	6
Publication status	Published - 2013
Externally published	Yes

Cite this

@inproceedings{a17a93d0597a42eda5e55a9b0576b1c0,

title = "Simulation of a Low Frequency Z-axis SU-8 Accelerometer in CoventorWare and MEMS+",

author = "Carreno, {Armando Arpys Arevalo} and David Conchouso and Amir Zaher and Ian Foulds and Technology, {King Abdullah University of Science}",

year = "2013",

language = "English",

pages = "792--797",

booktitle = "2013 UKSim 15th International Conference on Computer Modelling and Simulation",

}

TY - GEN

T1 - Simulation of a Low Frequency Z-axis SU-8 Accelerometer in CoventorWare and MEMS+

AU - Carreno, Armando Arpys Arevalo

AU - Conchouso, David

AU - Zaher, Amir

AU - Foulds, Ian

AU - Technology, King Abdullah University of Science

PY - 2013

Y1 - 2013

M3 - Conference Paper

SP - 792

EP - 797

BT - 2013 UKSim 15th International Conference on Computer Modelling and Simulation

ER -