Simple unimorph deformable mirrors fabricated from piezo buzzers

Jaka Pribosek, Janez Diaci, Stefan Sinzinger

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Journal of Micromechanics and Microengineering
Volume	26
Issue number	5
DOIs	https://doi.org/10.1088/0960-1317/26/5/055009
Publication status	Published - 2016
Externally published	Yes

Access to Document

TY - JOUR

T1 - Simple unimorph deformable mirrors fabricated from piezo buzzers

AU - Pribosek, Jaka

AU - Diaci, Janez

AU - Sinzinger, Stefan

PY - 2016

Y1 - 2016

U2 - 10.1088/0960-1317/26/5/055009

DO - 10.1088/0960-1317/26/5/055009

M3 - Article

SN - 1361-6439

VL - 26

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 5

ER -