Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications

Rainer Hainberger; Paul Muellner; Stefan Nevlacsil; Alejandro Maese-Novo; Florian Vogelbacher; Moritz Eggeling; Jörg Schotter; Martin Sagmeister; Günther Koppitsch; Jochen Kraft

doi:10.1117/12.2509982

Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications

Rainer Hainberger, Paul Muellner, Stefan Nevlacsil, Alejandro Maese-Novo, Florian Vogelbacher, Moritz Eggeling, Jörg Schotter, Martin Sagmeister, Günther Koppitsch, Jochen Kraft

Research output: Contribution to conference (No Proceedings) › Paper

Abstract

We report the simulation, design and experimental validation of various PECVD silicon nitride photonic building blocks required for the implementation of a CMOS-compatible photonic integrated circuit technology platform operating in the 850 nm and 600 nm wavelength domain. In particular, we discuss an inverted taper structure for efficient coupling of light to and from the chip, propagation and bend losses as well as broadband power and polarization beam splitters in the 850 nm region. In the 600 nm wavelength region, we demonstrate the realization of an optically pumped integrated dye-doped polymer laser that couples its laser light directly into a silicon nitride waveguide.

Original language	English
DOIs	https://doi.org/10.1117/12.2509982
Publication status	Published - 4 Mar 2019
Externally published	Yes
Event	Smart Photonic and Optoelectronic Integrated Circuits XXI - San Francisco, United States Duration: 2 Feb 2019 → 7 Feb 2019

Conference

Conference	Smart Photonic and Optoelectronic Integrated Circuits XXI
Period	2/02/19 → 7/02/19

Access to Document

10.1117/12.2509982

Cite this

Hainberger, R., Muellner, P., Nevlacsil, S., Maese-Novo, A., Vogelbacher, F., Eggeling, M., Schotter, J., Sagmeister, M., Koppitsch, G., & Kraft, J. (2019). Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications. Paper presented at Smart Photonic and Optoelectronic Integrated Circuits XXI. https://doi.org/10.1117/12.2509982

@conference{6114178439cd476db07e38b940609035,

title = "Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications",

abstract = "We report the simulation, design and experimental validation of various PECVD silicon nitride photonic building blocks required for the implementation of a CMOS-compatible photonic integrated circuit technology platform operating in the 850 nm and 600 nm wavelength domain. In particular, we discuss an inverted taper structure for efficient coupling of light to and from the chip, propagation and bend losses as well as broadband power and polarization beam splitters in the 850 nm region. In the 600 nm wavelength region, we demonstrate the realization of an optically pumped integrated dye-doped polymer laser that couples its laser light directly into a silicon nitride waveguide.",

author = "Rainer Hainberger and Paul Muellner and Stefan Nevlacsil and Alejandro Maese-Novo and Florian Vogelbacher and Moritz Eggeling and J{\"o}rg Schotter and Martin Sagmeister and G{\"u}nther Koppitsch and Jochen Kraft",

year = "2019",

month = mar,

day = "4",

doi = "10.1117/12.2509982",

language = "English",

note = "Smart Photonic and Optoelectronic Integrated Circuits XXI ; Conference date: 02-02-2019 Through 07-02-2019",

}

Hainberger, R, Muellner, P, Nevlacsil, S, Maese-Novo, A, Vogelbacher, F, Eggeling, M, Schotter, J, Sagmeister, M, Koppitsch, G & Kraft, J 2019, 'Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications', Paper presented at Smart Photonic and Optoelectronic Integrated Circuits XXI, 2/02/19 - 7/02/19. https://doi.org/10.1117/12.2509982

TY - CONF

T1 - Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications

AU - Hainberger, Rainer

AU - Muellner, Paul

AU - Nevlacsil, Stefan

AU - Maese-Novo, Alejandro

AU - Vogelbacher, Florian

AU - Eggeling, Moritz

AU - Schotter, Jörg

AU - Sagmeister, Martin

AU - Koppitsch, Günther

AU - Kraft, Jochen

PY - 2019/3/4

Y1 - 2019/3/4

N2 - We report the simulation, design and experimental validation of various PECVD silicon nitride photonic building blocks required for the implementation of a CMOS-compatible photonic integrated circuit technology platform operating in the 850 nm and 600 nm wavelength domain. In particular, we discuss an inverted taper structure for efficient coupling of light to and from the chip, propagation and bend losses as well as broadband power and polarization beam splitters in the 850 nm region. In the 600 nm wavelength region, we demonstrate the realization of an optically pumped integrated dye-doped polymer laser that couples its laser light directly into a silicon nitride waveguide.

AB - We report the simulation, design and experimental validation of various PECVD silicon nitride photonic building blocks required for the implementation of a CMOS-compatible photonic integrated circuit technology platform operating in the 850 nm and 600 nm wavelength domain. In particular, we discuss an inverted taper structure for efficient coupling of light to and from the chip, propagation and bend losses as well as broadband power and polarization beam splitters in the 850 nm region. In the 600 nm wavelength region, we demonstrate the realization of an optically pumped integrated dye-doped polymer laser that couples its laser light directly into a silicon nitride waveguide.

U2 - 10.1117/12.2509982

DO - 10.1117/12.2509982

M3 - Paper

T2 - Smart Photonic and Optoelectronic Integrated Circuits XXI

Y2 - 2 February 2019 through 7 February 2019

ER -

Silicon-nitride waveguide-based integrated photonic circuits for medical diagnostic and other sensing applications

Abstract

Conference

Access to Document

Fingerprint

Cite this