Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin films

Lisanne Demelius, Matthias Blatnik, Katrin Unger, Paola Parlanti, Mauro Gemmi, Anna Maria Coclite

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@article{0f3d09589258443bbc07204a614e24b0,

title = "Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin films",

author = "Lisanne Demelius and Matthias Blatnik and Katrin Unger and Paola Parlanti and Mauro Gemmi and Coclite, {Anna Maria}",

year = "2022",

month = dec,

doi = "10.1016/j.apsusc.2022.154619",

language = "English",

journal = "Applied Surface Science",

issn = "0169-4332",

publisher = "Elsevier",

}

TY - JOUR

T1 - Shedding light on the initial growth of ZnO during plasma-enhanced atomic layer deposition on vapor-deposited polymer thin films

AU - Demelius, Lisanne

AU - Blatnik, Matthias

AU - Unger, Katrin

AU - Parlanti, Paola

AU - Gemmi, Mauro

AU - Coclite, Anna Maria

PY - 2022/12

Y1 - 2022/12

UR - http://dx.doi.org/10.1016/j.apsusc.2022.154619

U2 - 10.1016/j.apsusc.2022.154619

DO - 10.1016/j.apsusc.2022.154619

M3 - Article

SN - 0169-4332

JO - Applied Surface Science

JF - Applied Surface Science

ER -