Abstract
A scanning mirror can prevent the oxidation or hydroxylation of a torsion bar, thereby suppressing deterioration of the torsion bar and a manufacturing method for the scanning mirror. A scanning mirror has a torsion bar which is provided so as to support a mirror portion and of which the surface is covered with an ALD layer. The scanning mirror is configured such that the mirror portion can be rotated around an axis that extends along the torsion bar when torsional force is applied to the torsion bar. The scanning mirror is manufactured by forming the mirror portion and the torsion bar and then forming an ALD layer on at least the surface of the torsion bar using an atomic layer deposition method.
| Original language | English |
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| Patent number | 20220066198 (publication) 17/417,981 (application) |
| IPC | G02B 26/08 (20060101),C23C 16/455 (20060101),B81B 3/00 (20060101),C23C 16/32 (20060101),C23C 16/34 (20060101),C23C 16/40 (20060101) |
| Priority date | 25/05/19 |
| Filing date | 27/04/20 |
| Publication status | Published - 3 Mar 2022 |
| Externally published | Yes |