Scanning micro-mirror with an electrostatic spring for compensation of hard-spring nonlinearity

T. Izawa, T. Sasaki, K. Hane

Research output: Contribution to journal › Article › peer-review

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TY - JOUR

T1 - Scanning micro-mirror with an electrostatic spring for compensation of hard-spring nonlinearity

AU - Izawa, T.

AU - Sasaki, T.

AU - Hane, K.

PY - 2017

Y1 - 2017

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85027138340&partnerID=MN8TOARS

U2 - 10.3390/mi8080240

DO - 10.3390/mi8080240

M3 - Artikel

SN - 2072-666X

JO - Micromachines

JF - Micromachines

ER -