Resonant varifocal micromirror with piezoresistive focus sensor

K. Nakazawa, T. Sasaki, H. Furuta, J. Kamiya, H. Sasaki, T. Kamiya, K. Hane

Research output: Contribution to journal › Article › peer-review

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TY - JOUR

T1 - Resonant varifocal micromirror with piezoresistive focus sensor

AU - Nakazawa, K.

AU - Sasaki, T.

AU - Furuta, H.

AU - Kamiya, J.

AU - Sasaki, H.

AU - Kamiya, T.

AU - Hane, K.

PY - 2016

Y1 - 2016

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84965137073&partnerID=MN8TOARS

U2 - 10.3390/mi7040057

DO - 10.3390/mi7040057

M3 - Artikel

SN - 2072-666X

JO - Micromachines

JF - Micromachines

ER -