Polymer bonding of GaN crystal layer on silicon substrate for micro mechanical resonator applications

T. Sasaki, Y. Hayakawa, K. Hane

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TY - JOUR

T1 - Polymer bonding of GaN crystal layer on silicon substrate for micro mechanical resonator applications

AU - Sasaki, T.

AU - Hayakawa, Y.

AU - Hane, K.

PY - 2017

Y1 - 2017

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84979222015&partnerID=MN8TOARS

U2 - 10.1007/s00542-016-3075-0

DO - 10.1007/s00542-016-3075-0

M3 - Artikel

SN - 0946-7076

JO - Microsystem Technologies

JF - Microsystem Technologies

ER -