Abstract
We demonstrate a CMOS compatible interferometric plasmo-photonic sensor exploiting Si3N4 photonic and aluminum (Al) plasmonic stripe waveguides. Experimental evaluation revealed bulk sensitivity of 4764 nm/RIU, holding promise for ultra-sensitive and low cost sensing devices. © 2020 OSA.
Original language | English |
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Publication status | Published - 2020 |
Externally published | Yes |
Keywords
- Aluminum
- Aluminum compounds
- Interferometry
- Plasmonics
- Silicon compounds
- Aluminum (Al)
- Bulk sensitivity
- CMOS Compatible
- Experimental evaluation
- Low cost sensing devices
- Photonic sensors
- Stripe waveguide
- Ultra sensitives
- Optical waveguides