Piezoelectric nanoelectromechanical systems

K.M. Howell; Annalisa De Pastina; A. Lozzi; T. Larsen; M. Faizan; Luis Guillermo Villanueva

doi:10.1109/TRANSDUCERS.2017.7994010

Piezoelectric nanoelectromechanical systems

K.M. Howell, Annalisa De Pastina, A. Lozzi, T. Larsen, M. Faizan, Luis Guillermo Villanueva

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

n this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.

Original language	English
Title of host publication	TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
DOIs	https://doi.org/10.1109/TRANSDUCERS.2017.7994010
Publication status	Published - 2017
Externally published	Yes

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@inproceedings{8315e8b2125a434f92ddc16b02e821ca,

title = "Piezoelectric nanoelectromechanical systems",

abstract = "n this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.",

author = "K.M. Howell and {De Pastina}, Annalisa and A. Lozzi and T. Larsen and M. Faizan and Villanueva, {Luis Guillermo}",

year = "2017",

doi = "10.1109/TRANSDUCERS.2017.7994010",

language = "English",

booktitle = "TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems",

}

TY - GEN

T1 - Piezoelectric nanoelectromechanical systems

AU - Howell, K.M.

AU - De Pastina, Annalisa

AU - Lozzi, A.

AU - Larsen, T.

AU - Faizan, M.

AU - Villanueva, Luis Guillermo

PY - 2017

Y1 - 2017

N2 - n this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.

AB - n this paper we describe five different transduction techniques for the motion of NEMS resonators. We describe how these techniques differ from those used for MEMS and how centrosymmetric or amorphous materials can be used to fabricate NEMS.

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-85029373567&partnerID=MN8TOARS

U2 - 10.1109/TRANSDUCERS.2017.7994010

DO - 10.1109/TRANSDUCERS.2017.7994010

M3 - Conference Paper

BT - TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

ER -

Piezoelectric nanoelectromechanical systems

Abstract

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