Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators

Anton Lagosh; Benedikt Guldimann; Philippe Giaccari; Gregoire Kerr; Takeshi Nishizawa; Berit Ahlers; Peyman Rahnama; Niels Quack

doi:10.1109/MEMS51670.2022.9699546

Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators

Anton Lagosh, Benedikt Guldimann, Philippe Giaccari, Gregoire Kerr, Takeshi Nishizawa, Berit Ahlers, Peyman Rahnama, Niels Quack

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Abstract

We present design, fabrication and experimental characterization of a multichannel Smart Slit Assembly for next generation spectrometers, based on an array of 40 variable optical attenuators employing MEMS shutters integrated with large core multimode rectangular waveguides. The MEMS actuated shutters are fabricated in a 211 µm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. We experimentally demonstrate high shutting efficiency of 99.97% at 532 nm and fast reconfiguration <500 µs with 74 V actuation voltage. We also experimentally demonstrate a significantly expanded operating wavelength range up to the SWIR region using conformal Platinum coating while keeping a shutting efficiency exceeding 99.9%.

Original language	English
Title of host publication	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Pages	991-994
Number of pages	4
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699546
Publication status	Published - 13 Jan 2022
Externally published	Yes
Event	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022

Conference

Conference	2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)
Period	9/01/22 → 13/01/22

Keywords

Optical fibers
Micromechanical devices
Conferences
Optical device fabrication
Platinum
Optical attenuators
Voltage

Access to Document

10.1109/MEMS51670.2022.9699546

Cite this

Lagosh, A., Guldimann, B., Giaccari, P., Kerr, G., Nishizawa, T., Ahlers, B., Rahnama, P., & Quack, N. (2022). Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators. In 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) (pp. 991-994). Article 9699546 https://doi.org/10.1109/MEMS51670.2022.9699546

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title = "Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators",

abstract = "We present design, fabrication and experimental characterization of a multichannel Smart Slit Assembly for next generation spectrometers, based on an array of 40 variable optical attenuators employing MEMS shutters integrated with large core multimode rectangular waveguides. The MEMS actuated shutters are fabricated in a 211 µm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. We experimentally demonstrate high shutting efficiency of 99.97% at 532 nm and fast reconfiguration <500 µs with 74 V actuation voltage. We also experimentally demonstrate a significantly expanded operating wavelength range up to the SWIR region using conformal Platinum coating while keeping a shutting efficiency exceeding 99.9%.",

keywords = "Optical fibers, Micromechanical devices, Conferences, Optical device fabrication, Platinum, Optical attenuators, Voltage",

author = "Anton Lagosh and Benedikt Guldimann and Philippe Giaccari and Gregoire Kerr and Takeshi Nishizawa and Berit Ahlers and Peyman Rahnama and Niels Quack",

year = "2022",

month = jan,

day = "13",

doi = "10.1109/MEMS51670.2022.9699546",

language = "English",

isbn = "978-1-6654-0912-4",

pages = "991--994",

booktitle = "2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)",

note = "2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS) ; Conference date: 09-01-2022 Through 13-01-2022",

}

Lagosh, A, Guldimann, B, Giaccari, P, Kerr, G, Nishizawa, T, Ahlers, B, Rahnama, P & Quack, N 2022, Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators. in 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)., 9699546, pp. 991-994, 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS), 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699546

Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators. / Lagosh, Anton; Guldimann, Benedikt; Giaccari, Philippe et al.
2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS). 2022. p. 991-994 9699546.

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

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T1 - Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators

AU - Lagosh, Anton

AU - Guldimann, Benedikt

AU - Giaccari, Philippe

AU - Kerr, Gregoire

AU - Nishizawa, Takeshi

AU - Ahlers, Berit

AU - Rahnama, Peyman

AU - Quack, Niels

PY - 2022/1/13

Y1 - 2022/1/13

N2 - We present design, fabrication and experimental characterization of a multichannel Smart Slit Assembly for next generation spectrometers, based on an array of 40 variable optical attenuators employing MEMS shutters integrated with large core multimode rectangular waveguides. The MEMS actuated shutters are fabricated in a 211 µm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. We experimentally demonstrate high shutting efficiency of 99.97% at 532 nm and fast reconfiguration <500 µs with 74 V actuation voltage. We also experimentally demonstrate a significantly expanded operating wavelength range up to the SWIR region using conformal Platinum coating while keeping a shutting efficiency exceeding 99.9%.

AB - We present design, fabrication and experimental characterization of a multichannel Smart Slit Assembly for next generation spectrometers, based on an array of 40 variable optical attenuators employing MEMS shutters integrated with large core multimode rectangular waveguides. The MEMS actuated shutters are fabricated in a 211 µm thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. We experimentally demonstrate high shutting efficiency of 99.97% at 532 nm and fast reconfiguration <500 µs with 74 V actuation voltage. We also experimentally demonstrate a significantly expanded operating wavelength range up to the SWIR region using conformal Platinum coating while keeping a shutting efficiency exceeding 99.9%.

KW - Optical fibers

KW - Micromechanical devices

KW - Conferences

KW - Optical device fabrication

KW - Platinum

KW - Optical attenuators

KW - Voltage

U2 - 10.1109/MEMS51670.2022.9699546

DO - 10.1109/MEMS51670.2022.9699546

M3 - Conference Paper

SN - 978-1-6654-0912-4

SP - 991

EP - 994

BT - 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

T2 - 2022 IEEE 35th International Conference on Micro Electro Mechanical Systems Conference (MEMS)

Y2 - 9 January 2022 through 13 January 2022

ER -

Multichannel Smart Slit Assembly for Spectroscopy Based on Arrays of Variable Optical MEMS Attenuators

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