Monolithic displacement encoder sensor integrating GaN LED and Si photodiodes

S. Nagai; T. Sasaki; H. Kawaguchi; A. Iwabuchi; K. Hane

doi:10.1109/Transducers.2013.6626931

Monolithic displacement encoder sensor integrating GaN LED and Si photodiodes

S. Nagai, T. Sasaki, H. Kawaguchi, A. Iwabuchi, K. Hane

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

Original language	Undefined/Unknown
Title of host publication	2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013
DOIs	https://doi.org/10.1109/Transducers.2013.6626931
Publication status	Published - 2013

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10.1109/Transducers.2013.6626931

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@inproceedings{f56136b0896d4d34aff232df17e03a1a,

title = "Monolithic displacement encoder sensor integrating GaN LED and Si photodiodes",

author = "S. Nagai and T. Sasaki and H. Kawaguchi and A. Iwabuchi and K. Hane",

year = "2013",

doi = "10.1109/Transducers.2013.6626931",

language = "undefiniert/unbekannt",

booktitle = "2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013",

}

Monolithic displacement encoder sensor integrating GaN LED and Si photodiodes. / Nagai, S.; Sasaki, T.; Kawaguchi, H. et al.
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013. 2013.

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper

TY - GEN

T1 - Monolithic displacement encoder sensor integrating GaN LED and Si photodiodes

AU - Nagai, S.

AU - Sasaki, T.

AU - Kawaguchi, H.

AU - Iwabuchi, A.

AU - Hane, K.

PY - 2013

Y1 - 2013

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U2 - 10.1109/Transducers.2013.6626931

DO - 10.1109/Transducers.2013.6626931

M3 - Konferenzartikel

BT - 2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013

ER -

Monolithic displacement encoder sensor integrating GaN LED and Si photodiodes

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