TY - JOUR
T1 - Modular interface and experimental setup for in-vacuum operation of microfluidic devices
AU - Maillard, Damien
AU - De Pastina, Annalisa
AU - Larsen, Tom
AU - Villanueva, Luis Guillermo
PY - 2019/4
Y1 - 2019/4
N2 - We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brings fluid samples from a commercial syringe pump to the chip with the help of o-rings. In addition to that, the connector serves as an on-chip vacuum chamber. To confirm the adequate operation of our interface, we use complex microfluidic devices that were previously fabricated, suspended microchannel resonators, and demonstrate a fast exchange between fluids (on the scale of 130 s from isopropyl alcohol to water), in-vacuum operation of the devices (intrinsic damping regime), and accurate temperature control of the chip at different set points.
AB - We report on the design and operation of a world-to-chip microfluidic interface and experimental setup for fluidic micro- and nano-electromechanical systems. The central component of the interface is an engineered polyether ether ketone connector that brings fluid samples from a commercial syringe pump to the chip with the help of o-rings. In addition to that, the connector serves as an on-chip vacuum chamber. To confirm the adequate operation of our interface, we use complex microfluidic devices that were previously fabricated, suspended microchannel resonators, and demonstrate a fast exchange between fluids (on the scale of 130 s from isopropyl alcohol to water), in-vacuum operation of the devices (intrinsic damping regime), and accurate temperature control of the chip at different set points.
UR - https://doi.org/10.1063/1.5088946
U2 - 10.1063/1.5088946
DO - 10.1063/1.5088946
M3 - Article
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
ER -