Modified hard anodization procedure to fabricate hybrid nanoporous alumina

A. Santos, L. Vojkuvka, J. Pallarés, J. Ferré-Borrull, L. F. Marsal

Research output: Conference proceeding/Chapter in Book/Report/Chapter

Abstract

In this work we present an innovative approach to fabricate new structures based on nanoporous alumina. The fabrication process is carried out following a modified two-step hard anodization process in a 0.3M oxalic acid solution at 120V and 0°C. The nanoporous anodic alumina membranes present a hybrid pore structure which consist of pores with short diameters inner pores with longer diameters. This new nanostructure could be used to develop new chemical or biological sensors or to fabricate optoelectronic and storage devices. © 2009 IEEE.
Original languageEnglish
Title of host publicationProceedings of the 2009 Spanish Conference on Electron Devices, CDE'09
Pages436-439
Number of pages4
DOIs
Publication statusPublished - 2009
Externally publishedYes

Publication series

NameProceedings of the 2009 Spanish Conference on Electron Devices, CDE'09

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