Micromirrors connected in series for low voltage operation in vacuum

S. Kotani, H. Manh Chu, T. Sasaki, K. Hane

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
DOIs	https://doi.org/10.1116/1.4807847
Publication status	Published - 2013

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TY - JOUR

T1 - Micromirrors connected in series for low voltage operation in vacuum

AU - Kotani, S.

AU - Manh Chu, H.

AU - Sasaki, T.

AU - Hane, K.

PY - 2013

Y1 - 2013

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84887464034&partnerID=MN8TOARS

U2 - 10.1116/1.4807847

DO - 10.1116/1.4807847

M3 - Artikel

SN - 1071-1023

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

ER -