Material Parameter Extraction for Complex AlScN Thin Film Using Dual Mode Resonators in Combination with Advanced Microstructural Analysis and Finite Element Modeling
Fazel Parsapour, Vladimir Pashchenko, Nicolas Kurz, Cosmin Silviu Sandu, Thomas LaGrange, Kaoru Yamashita, Vadim Lebedev, Paul Muralt
Research output: Contribution to journal › Article › peer-review
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