Magnetostatic micro-actuator based on ultrasoft elastomeric membrane and copper - Permalloy electrodeposited structures

J. Streque, A. Talbi, C. Bonnerot, P. Pernod, V. Preobrazhensky

Research output: Conference proceeding/Chapter in Book/Report/ › Conference Paper › peer-review

Original language	American English
Title of host publication	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170368
Publication status	Published - 2012

Access to Document

@inproceedings{065dc79cb0064547a1b4458b7aff345a,

title = "Magnetostatic micro-actuator based on ultrasoft elastomeric membrane and copper - Permalloy electrodeposited structures",

author = "J. Streque and A. Talbi and C. Bonnerot and P. Pernod and V. Preobrazhensky",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170368",

language = "Englisch (Amerika)",

booktitle = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

}

TY - GEN

T1 - Magnetostatic micro-actuator based on ultrasoft elastomeric membrane and copper - Permalloy electrodeposited structures

AU - Streque, J.

AU - Talbi, A.

AU - Bonnerot, C.

AU - Pernod, P.

AU - Preobrazhensky, V.

PY - 2012

Y1 - 2012

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84860487983&partnerID=MN8TOARS

U2 - 10.1109/MEMSYS.2012.6170368

DO - 10.1109/MEMSYS.2012.6170368

M3 - Konferenzartikel

BT - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ER -