Initial deflection of silicon-on-insulator thin membrane micro-mirror and fabrication of varifocal mirror

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	Sensors and Actuators A: Physical
DOIs	https://doi.org/10.1016/j.sna.2011.09.042
Publication status	Published - 2011

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TY - JOUR

T1 - Initial deflection of silicon-on-insulator thin membrane micro-mirror and fabrication of varifocal mirror

AU - Sasaki, T.

AU - Hane, K.

PY - 2011

Y1 - 2011

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-82955187807&partnerID=MN8TOARS

U2 - 10.1016/j.sna.2011.09.042

DO - 10.1016/j.sna.2011.09.042

M3 - Artikel

SN - 0924-4247

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

ER -