Improving the quality of sputtered AlN and AlScN layers for BAW RF filters for 5G applications

Gibin Nellinilkkum Thadathil Jolly

    Research output: Types of Thesis › Master's Thesis

    Original languageEnglish
    QualificationMaster of Science
    Awarding Institution
    • University of Applied Sciences Jena
    Supervisors/Advisors
    • Risquez, Sarah, Supervisor
    Publication statusIn preparation - 2021

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