High surface accuracy resonant varifocal mirror

K. Nakazawa, T. Sasaki, K. Hane

Research output: Contribution to journal › Article › peer-review

Original language	Undefined/Unknown
Journal	IEEJ Transactions on Sensors and Micromachines
DOIs	https://doi.org/10.1541/ieejsmas.135.165
Publication status	Published - 2015

Access to Document

TY - JOUR

T1 - High surface accuracy resonant varifocal mirror

AU - Nakazawa, K.

AU - Sasaki, T.

AU - Hane, K.

PY - 2015

Y1 - 2015

UR - http://www.scopus.com/inward/record.url?eid=2-s2.0-84929319789&partnerID=MN8TOARS

U2 - 10.1541/ieejsmas.135.165

DO - 10.1541/ieejsmas.135.165

M3 - Artikel

SN - 1341-8939

JO - IEEJ Transactions on Sensors and Micromachines

JF - IEEJ Transactions on Sensors and Micromachines

ER -